Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 86: | Line 86: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!'''Resolution z''' | !'''Resolution z''' | ||
|0.01, 0.08 or 0.6 Å depending on range ( | |0.01, 0.08 or 0.6 Å depending on range (note resolution much below 1 Å is not so useful since it is far below the noise level) | ||
|1 Å, 10 Å, 40 Å or 160 Å depending on range | |1 Å, 10 Å, 40 Å or 160 Å depending on range | ||
|Depending on measuring methode: | |Depending on measuring methode: | ||