Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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The error stemming from the uncertainty on the calibration standard dominates for all ranges except the 1 mm range, where the resolution also plays a role. This leads to the 95 % confidence intervals listed above in the table: just over 30 nm for the smallest range, about 0.17 µm for the medium ranges, and about 0.6 µm for the 1 mm range. As noted above, be aware that if you have a step height that is difficult to measure, the scatter of repeated measurements could easily lead to larger confidence intervals. | The error stemming from the uncertainty on the calibration standard dominates for all ranges except the 1 mm range, where the resolution also plays a role. This leads to the 95 % confidence intervals listed above in the table: just over 30 nm for the smallest range, about 0.17 µm for the medium ranges, and about 0.6 µm for the 1 mm range. As noted above, be aware that if you have a step height that is difficult to measure, the scatter of repeated measurements could easily lead to larger confidence intervals. | ||
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==Stylus Profiler (Tencor P17) [[Image:section under construction.jpg|70px]]== | |||
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and nanometer range. The P17 can also be used for stress mapping and roughness measurements. | |||
A profile measurement can be done across a specific structure by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure a sequence of scans defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films on a wafer can be done by measuring the wafer's curvature. | |||
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:''' | |||
[link coming soon] | |||
===Equipment performance and process related parameters Stylus Profiler (Tencor P17)=== | |||
<!--[[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA: positioned in cleanroom F-2.]] | |||
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!style="background:silver; color:black;" align="left"|Purpose | |||
|style="background:LightGrey; color:black"|Profiler for measuring micro structures||style="background:WhiteSmoke; color:black"| | |||
*Single line profiles | |||
*Wafer mapping | |||
*[[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] by measuring wafer bow | |||
*Surface roughness on a line scan | |||
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!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance | |||
|style="background:LightGrey; color:black"|Scan range x y | |||
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Line scan x: 50 µm to 55 mm in a single scan, up to 200 mm with stiching | |||
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|style="background:LightGrey; color:black"|Scan range z | |||
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50 Å to 1 mm | |||
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|style="background:LightGrey; color:black"|Resolution x y | |||
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Down to 0.003 µm | |||
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|style="background:LightGrey; color:black"|Resolution z | |||
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1 Å, 10 Å, 80 Å or 160 Å (for ranges 65 kÅ, 655 kÅ, 5240 kÅ and 1 mm respectively) | |||
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |||
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~ 300 Å for the 65 kÅ range, ~ 0.17 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range for well-defined steps that are easy to measure reproducibly ([[#Height measurement accuracy for the DektakXT|see below]]) | |||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |||
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1.2*(W[µm]-5µm) | |||
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!style="background:silver; color:black" align="left"|Hardware settings | |||
|style="background:LightGrey; color:black"|Tip radius | |||
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*5 µm 45<sup>o</sup> cone | |||
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!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
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*Up to 6" | |||
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| style="background:LightGrey; color:black"|Substrate materials allowed | |||
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*In principle all materials | |||
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===Height measurement accuracy for the Tencor P17 Stylus Profiler === | |||
Similar to what the text says for Dektak XTA... | |||
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