Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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!'''Max. scan depth [µm] as a function of trench width W''') | !'''Max. scan depth [µm] as a function of trench width W''') | ||
| | |0.866*(W[µm]-2µm) | ||
|1.2*(W[µm]-5µm) | |1.2*(W[µm]-5µm) | ||
|Depending on material and trench width: | |Depending on material and trench width: | ||