Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!'''Max. scan depth [µm] as a function of trench width W''') | !'''Max. scan depth [µm] as a function of trench width W''') | ||
| | | | ||
|1.2*(W[µm]-5µm) | |1.2*(W[µm]-5µm) | ||
|Depending on material and trench width: | |Depending on material and trench width: | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!'''Standard tip radius''' | !'''Standard tip radius''' | ||
| | |2 µm 60<sup>o</sup> cone | ||
|5 µm 45<sup>o</sup> cone | |5 µm 45<sup>o</sup> cone | ||
|No tip - using light | |No tip - using light | ||