Specific Process Knowledge/Characterization: Difference between revisions

@@ Line 13: / Line 13: @@
 == Choose equipment ==
-*[[SEM: Scanning Electron Microscopy]]
+===[[SEM: Scanning Electron Microscopy]]===
-*[[AFM: Atomic Force Microscopy]]
+*LEO SEM
-*[[Profiler]] Tencor
+*FEI SEM
-*[[Optical microscope]]
+*JEOL SEM
-*[[Optical characterization]] ellipsometer - Filmtek - prismcoupler
-*[[SIMS: Secondary Ion Mass Spectrometry]]
+===[[AFM: Atomic Force Microscopy]]===
+===[[Profiler]]===
+*Tencor
 *[[Dektak stylus profiler]]
-*Drop shape analyser
+===[[Optical microscope]]===
-*4-point probe
+===[[Optical characterization]]===
-*Stylus thickness measure
+*ellipsometer
+**Filmtek
+**prism coupler
+===[[SIMS: Secondary Ion Mass Spectrometry]]===
+===Drop shape analyser===
+===4-point probe===
+===Stylus thickness measure===