Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
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==Etching of Gold== | ==Etching of Gold== | ||
Etching of Gold can be done either by wet etch or by sputtering with ions. | Etching of Gold can be done either by wet etch, or by sputtering with ions. | ||
*[[Specific Process Knowledge/Etch/Wet Gold Etch|Etching of Gold by wet etch]] | *[[Specific Process Knowledge/Etch/Wet Gold Etch|Etching of Gold by wet etch]] | ||
*[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch|Sputtering of Au]] | *[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch|Sputtering of Au]] | ||