Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Developers= | =Developers= | ||
*AR 600-546 (Amyl acetate). Stored in E-4 | *AR 600-546 (Amyl acetate). Stored in E-4 | ||
*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4. | *AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4. | ||
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4. | *AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4. | ||