Revision as of 09:51, 22 December 2020

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This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.

Acids, bases, and etchants

Ammonia solution 28%. Stored in D-3?
Ammonium persulphate (Powder). Stored in D-3.
BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3.
BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
Boric acid. Stored in D-3?
Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1.
HF 5%. Stored in D-3?
HF 40%. Stored in D-3?
Hydrochloric acid 37%. Stored in D-3.
Hydrogen peroxide 31%. Stored in D-3.
Nitric acid 69%. Stored in D-3.
Phosphoric acid 85%. Stored in D-3.
Potassium hydroxide (Pellets). Stored in D-3.
Potassium hydroxide 50%. Stored in D-3.
Sulfamic acid. Stored in D-3?
Sulfuric acid 96%. Stored in D-3.

Developers

AR 600-546 (Amyl acetate). Stored in E-4?
AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
mr-Dev 600 (PGMEA). Stored in Bx1.
ZED-N50 (n-Amylacetate). Stored in E-4.

Resists

AR-P 6200.09. Stored in E-4.
AZ 4562. Stored in E-4, small bottle in E-5.
AZ 5214E. Stored in E-4, small bottle in E-5.
AZ nLOF 2020. Stored in E-4, small bottle in E-5.
AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5.
DUV42S-6 (BARC for stepper). Stored in E-4.
KRF M230Y 6cp. Stored in E-4.
KRF M35G 27cp. Stored in E-4.
SU-8 2005. Stored in C-1.
SU-8 2035. Stored in C-1.
SU-8 2075. Stored in C-1.

Solvents

2-Propanol "IPA". Stored in C-1, D-3, E-4.
Acetone. Stored in C-1, D-3, E-4.
Anisole. Stored in E-4.
AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4.
A-Thinner (Anisole). Stored in E-4.
Ethanol. Stored in C-1, D-3, E-4.
MIBK. Stored in E-4.
PGMEA (available as mr-Dev 600). Stored in Bx1.
Remover 1165 (NMP). Stored in D-3, E-4.

Other chemicals

HMDS. Stored in E-4.

Missing from list?

Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
Ethyl Acetate?
HSQ?
UVN2300?

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 =Acids, bases, and etchants=
-*Ammonia solution 28%
+*Ammonia solution 28%. Stored in D-3?
-*Ammonium persulphate (Powder)
+*Ammonium persulphate (Powder). Stored in D-3.
-*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid)
+*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3.
-*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
+*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
-*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
+*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
-*Boric acid
+*Boric acid. Stored in D-3?
-*Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid)
+*Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1.
-*HF 5%
+*HF 5%. Stored in D-3?
-*HF 40%
+*HF 40%. Stored in D-3?
-*Hydrochloric acid 37%
+*Hydrochloric acid 37%. Stored in D-3.
-*Hydrogen peroxide 31%
+*Hydrogen peroxide 31%. Stored in D-3.
-*Nitric acid 69%
+*Nitric acid 69%. Stored in D-3.
-*Phosphoric acid 85%
+*Phosphoric acid 85%. Stored in D-3.
-*Potassium hydroxide (Pellets)
+*Potassium hydroxide (Pellets). Stored in D-3.
-*Potassium hydroxide 50%
+*Potassium hydroxide 50%. Stored in D-3.
-*Sulfamic acid
+*Sulfamic acid. Stored in D-3?
-*Sulfuric acid 96%
+*Sulfuric acid 96%. Stored in D-3.
 =Developers=
-*AR 600-546 (Amyl acetate)
+*AR 600-546 (Amyl acetate). Stored in E-4?
-*AZ 351B (NaOH based with disodium tetraborate buffer)
+*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
-*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting)
+*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
-*mr-Dev 600 (PGMEA)
+*mr-Dev 600 (PGMEA). Stored in Bx1.
-*ZED-N50 (n-Amylacetate)
+*ZED-N50 (n-Amylacetate). Stored in E-4.
 =Resists=
-*AR-P 6200.09
+*AR-P 6200.09. Stored in E-4.
-*AZ 4562
+*AZ 4562. Stored in E-4, small bottle in E-5.
-*AZ 5214E
+*AZ 5214E. Stored in E-4, small bottle in E-5.
-*AZ MiR 701 (29cps)
+*AZ nLOF 2020. Stored in E-4, small bottle in E-5.
-*DUV42S-6 (BARC for stepper)
+*AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5.
-*KRF M230Y 6cp
+*DUV42S-6 (BARC for stepper). Stored in E-4.
-*KRF M35G 27cp
+*KRF M230Y 6cp. Stored in E-4.
-*SU-8 2005
+*KRF M35G 27cp. Stored in E-4.
-*SU-8 2035
+*SU-8 2005. Stored in C-1.
-*SU-8 2075
+*SU-8 2035. Stored in C-1.
+*SU-8 2075. Stored in C-1.
 =Solvents=
-*2-Propanol "IPA"
+*2-Propanol "IPA". Stored in C-1, D-3, E-4.
-*Acetone
+*Acetone. Stored in C-1, D-3, E-4.
-*Anisole
+*Anisole. Stored in E-4.
-*AR 600-71 (Mixture of Dioxolane, PGME)
+*AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4.
-*A-Thinner (Anisole)
+*A-Thinner (Anisole). Stored in E-4.
-*Ethanol
+*Ethanol. Stored in C-1, D-3, E-4.
-*MIBK
+*MIBK. Stored in E-4.
-*PGMEA (available as mr-Dev 600)
+*PGMEA (available as mr-Dev 600). Stored in Bx1.
-*Remover 1165 (NMP)
+*Remover 1165 (NMP). Stored in D-3, E-4.
 =Other chemicals=
-*HMDS
+*HMDS. Stored in E-4.
+=Missing from list?=
+*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
+*Ethyl Acetate?
+*HSQ?
+*UVN2300?