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Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions

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*AR 600-546 (Amyl acetate)
*AR 600-546 (Amyl acetate)
*AZ 351B (NaOH based with disodium tetraborate buffer)
*AZ 351B (NaOH based with disodium tetraborate buffer)
*AZ 726 MIF (TMAH based)
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting)
*mr-Dev 600 (PGMEA)
*mr-Dev 600 (PGMEA)
*ZED-N50 (n-Amylacetate)
*ZED-N50 (n-Amylacetate)