Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge click here]''' | |||
'''THIS PAGE IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]] | '''THIS PAGE IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]] | ||
Revision as of 14:17, 21 December 2020
Feedback to this page: click here
THIS PAGE IS UNDER CONSTRUCTION 
This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.
Acids, bases, and etchants
- Ammonia solution 28%
- Ammonium persulphate (Powder)
- BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid)
- BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
- BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
- Boric acid
- Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid)
- HF 5%
- HF 40%
- Hydrochloric acid 37%
- Hydrogen peroxide 31%
- Nitric acid 69%
- Phosphoric acid 85%
- Potassium hydroxide (Pellets)
- Potassium hydroxide 50%
- Sulfamic acid
- Sulfuric acid 96%
Developers
- AR 600-546 (Amyl acetate)
- AZ 351B (NaOH based with disodium tetraborate buffer)
- AZ 726 MIF (TMAH based)
- mr-Dev 600 (PGMEA)
- ZED-N50 (n-Amylacetate)
Resists
- AR-P 6200.09
- AZ 4562
- AZ 5214E
- AZ MiR 701 (29cps)
- DUV42S-6 (BARC for stepper)
- KRF M230Y 6cp
- KRF M35G 27cp
- SU-8 2005
- SU-8 2035
- SU-8 2075
Solvents
- 2-Propanol "IPA"
- Acetone
- Anisole
- AR 600-71 (Mixture of Dioxolane, PGME)
- A-Thinner (Anisole)
- Ethanol
- MIBK
- PGMEA (available as mr-Dev 600)
- Remover 1165 (NMP)
Other chemicals
- HMDS