Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 35: | Line 35: | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="2"| AZ 5206E<sup>1)</sup> | !rowspan="2"| AZ 5206E <sup>1)</sup> | ||
|rowspan="2"| 0.5 µm | |rowspan="2"| 0.5 µm | ||
|rowspan="2"| 375 nm | |rowspan="2"| 375 nm | ||