Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
No edit summary |
|||
| Line 23: | Line 23: | ||
== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||
Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | ||
The current configuration is set up for nanoscale etching. | The current configuration is set up for nanoscale etching. | ||