Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions
No edit summary |
|||
| Line 1: | Line 1: | ||
==Correct settings for temperatures on Pegasus 2 == | ==Correct settings for temperatures on Pegasus 2 == | ||
The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the | The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling | ||
[[file:Peg2tempsettings.jpg | 400px | frameless]] | [[file:Peg2tempsettings.jpg | 400px | frameless]] | ||