Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | ||
The current configuration is | The current configuration is set up for nanoscale etching. | ||
{{Template:Peg2configheader1 | {{Template:Peg2configheader1 | ||
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|ItemComment= The temperature on the heaters in the plasma source are set to 20 degrees with a high tolerance. This essentially corresponds to powered off compared to default Pegasus temperatures which are in the 120-140 degrees range. | |ItemComment= The temperature on the heaters in the plasma source are set to 20 degrees with a high tolerance. This essentially corresponds to powered off compared to default Pegasus temperatures which are in the 120-140 degrees range. | ||
Always make sure that the temperature settings in the recipes are not enabled | Always make sure that the temperature settings in the recipes are ''not'' enabled. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings |'''here''']] to have more information. | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||