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==Fabrication: Process flows ==
==Fabrication: Process flows ==


This fabrication process flow is used for the fabrication of the silicon bottom cell.
The fabrication process flow of the silicon bottom cell can be found via the link below. Note that the process flow only contains fabrication of the device precursor wafer (asymmetrically passivated wafer with selective polySi-based contacts), and not include the backend processing (TCO deposition, metallization, tandem integration, etc.).  


Process flow (word format):
Process flow (word format):
*[[media:Doubled-side TOPCon structure for Si-based tandems.docx|Silicon Bottom Cell Device Precursor - Process flow]]
*[[media:Doubled-side TOPCon structure for Si-based tandems.docx|Silicon Bottom Cell Device Precursor - Process flow]]