Specific Process Knowledge/Etch/OES: Difference between revisions
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The intensity of the light will depend on whether the molecule is a reactant or an etch product: | The intensity of the light will depend on whether the molecule is a reactant or an etch product: | ||
# Reactant: The concentration in the plasma: | # Reactant: The concentration in the plasma: | ||
## The carrier gas flow rate | |||
## The RF power (both coil and platen) | |||
## The process pressure | |||
# Etch product: | # Etch product: | ||