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Specific Process Knowledge/Etch/OES: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 19: Line 19:
| In||325.6
| In||325.6
|-
|-
| AlCl||261.4 || || N||674.0
| AlCl||261.4 || N||674.0
|-
|-
| As||235.0 || ||  N2||315.9, 337.1
| As||235.0 ||  N2||315.9, 337.1
|-
|-
| C2||516.5 || ||  NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
| C2||516.5 ||  NO||247.9, 288.5, 289.3, 303.5, 304.3, 319.8, 320.7, 337.7, 338.6
|-
|-
| CF2||251.9 || ||  O||777.2, 844.7
| CF2||251.9 ||  O||777.2, 844.7
|-
|-
| Cl||741.4 || ||  OH||281.1, 306.4, 308.9
| Cl||741.4 ||  OH||281.1, 306.4, 308.9
|-
|-
| CN||289.8, 304.2, 387.0 || ||  S||469.5
| CN||289.8, 304.2, 387.0 ||  S||469.5
|-
|-
| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8 || ||  Si||288.2
| CO||292.5, 302.8, 313.8, 325.3, 482.5, 483.5, 519.8 ||  Si||288.2
|-
|-
| F||703.7, 712.8 || ||  SiCl||287.1
| F||703.7, 712.8 ||  SiCl||287.1
|-
|-
| Ga||417.2 || || SiF||440.1, 777.0
| Ga||417.2 || SiF||440.1, 777.0
|-
|-
| H||486.1, 656.5 || || ||
| H||486.1, 656.5 || ||
|-
|-
|}
|}
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