Specific Process Knowledge/Etch/OES: Difference between revisions
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| align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)''' | | align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)''' | ||
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| Al||308.2, 309.3, 396.1 || | | Al||308.2, 309.3, 396.1 | ||
|rowspan="11"| | |||
| In||325.6 | |||
|- | |- | ||
| AlCl||261.4 || || N||674.0 | | AlCl||261.4 || || N||674.0 | ||