Specific Process Knowledge/Etch/OES: Difference between revisions
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{| border="2" cellspacing="1" cellpadding="1" | {| border="2" cellspacing="1" cellpadding="1" | ||
| align="center" style="background:#f0f0f0;"|'''Monitored species''' | | align="center" style="background:#f0f0f0;"|'''Monitored species''' | ||
| align="center" style="background:#f0f0f0;" width=" | | align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)''' | ||
| | | | ||
| align="center" style="background:#f0f0f0;"|'''Monitored species''' | | align="center" style="background:#f0f0f0;"|'''Monitored species''' | ||
| align="center" style="background:#f0f0f0;" width=" | | align="center" style="background:#f0f0f0;" width="120px"|'''Wavelength (nm)''' | ||
|- | |- | ||
| Al||308.2, 309.3, 396.1 || || In||325.6 | | Al||308.2, 309.3, 396.1 || || In||325.6 | ||