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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
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==Pegasus 3 - 150mm silicon etching==
==Pegasus 3 - 150mm silicon etching==


'''The tool is already installed and ready to process. '''
'''The tool is ready for user training. '''


[[Image:05x.jpg |frame|left|x300px|The Pegasus 3 cassette station (left), operator station (center) and support computer with Picoscope process monitoring. ]]
[[Image:05x.jpg |frame|left|x300px|The Pegasus 3 cassette station (left), operator station (center) and support computer with Picoscope process monitoring. ]]




The user manual(s), quality control procedure(s) and results, user APV(s) '''are not available''', technical information and contact information can be found in LabManager:
The user manual(s) is available, technical information and contact information can be found in LabManager:


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=455| LabManager]
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=455| LabManager]
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