Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 4: / Line 4: @@
 == Scanning electron microscopy in the cleanroom at DTU Nanolab==
+[[Specific_Process_Knowledge/Characterization/SEM_LEO|SEM LEO]]
 The number of electron microscopes at DTU Nanolab is large. The five SEMs in building 346 cover a wide range of needs both in the cleanroom and outside: From fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to ultra high resolution images on any type of sample intended for publication.
-* The SEM Supra 1 is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom.
+* The [[Specific_Process_Knowledge/Characterization/SEM_Supra_1|SEM Supra 1]] is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom.
-* The SEM 2 and 3 are located in the cleanroom where they serve as general imaging tools for samples that have been fabricated in the cleanroom. Like SEM Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector.
+* The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] and [[Specific_Process_Knowledge/Characterization/SEM_Supra_3|SEM Supra 3]] are located in the cleanroom where they serve as general imaging tools for samples that have been fabricated in the cleanroom. Like SEM Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The [[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] is also equipped with an airlock and an EDX detector.
-* The SEM Leo was a very reliable and rugged instrument that provided high quality images of most samples. It has now been decommissioned and relocated to DTU Mechanics.
+* The [[Specific_Process_Knowledge/Characterization/SEM_LEO|SEM LEO]] was a very reliable and rugged instrument that provided high quality images of most samples. It has now been decommissioned and relocated to DTU Mechanics.
-* The SEM Tabletop 1 is a tabletop SEM that is located in the basement outside the cleanroom. It has a limited resolution, but it is fast and easy to use, also for non-conducting samples. Training in the others SEMs is not required to use this SEM.
+* The [[Specific_Process_Knowledge/Characterization/SEM_Tabletop_1|SEM Tabletop 1]] is a tabletop SEM that is located in the basement outside the cleanroom. It has a limited resolution, but it is fast and easy to use, also for non-conducting samples. Training in the others SEMs is not required to use this SEM.
 SEM Supra 1, 2 and 3 SEM Leo s all manufactured by Carl Zeiss and have the same graphical user interface and very identical electron optics. But there are there are small hardware and software differences, thus a training is needed for each SEM you want to use.