Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="1" | {| border="2" cellspacing="0" cellpadding="1" | ||
!colspan="2" border="none" style="background:silver; color:black;" align="center | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']] | |style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']] | ||
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']] | |style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']] | ||
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|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| '''DRIE-Pegasus 4''']] | |style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| '''DRIE-Pegasus 4''']] | ||
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!style="background:silver; color:black;" align="center" valign="center" width=" | !style="background:silver; color:black;" align="center" valign="center" width="100" rowspan="2"|Purpose | ||
|style="background:Whitesmoke; color:black" width="80 | Primary | |style="background:Whitesmoke; color:black" width="80 | Primary | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||