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<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf


The next lecture will be held on the 23th of November.
The next lecture will be held on the 23rd of November.


Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>

Revision as of 13:04, 23 October 2020

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.

The next lectures will be held on the 16th of November.

Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
  • PVD (physical vapour deposition)
    • E-beam evaporation
    • Thermal evaporation
    • Sputtering
  • CVD (chemical vapour depostion)
    • LPCVD (low pressure chemical vapour deposition)
    • PECVD (plasma enhanced chemical vapour deposition)
  • ALD (atomic layer deposition)

Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held on the 23rd of November.

Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand importance of correct process pressure (for vacuum processes)
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


THIS PAGE IS UNDER CONSTRUCTION

Literature

Thermal Oxidation
Stress in Thin Films
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