Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
| Line 37: | Line 37: | ||
|rowspan="2"| 1.5 µm | |rowspan="2"| 1.5 µm | ||
| Fast | | Fast | ||
| | | 70 mJ/cm<sup>2</sup> (Jehem Oct 2020) | ||
| 0 (Jehem | | 0 (Jehem Oct 2020) | ||
| 2 µm (due to stitching) | | 2 µm (due to stitching) | ||
| Dev: SP60s | | Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| Quality | | Quality | ||
| | | 70 mJ/cm<sup>2</sup> (Jehem Oct 2020) | ||
| 0 (Jehem | | 0 (Jehem Oct 2020) | ||
| 1.25 µm | | 1.25 µm | ||
| Dev: SP60s | | Dev: SP60s | ||