Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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 |- align="center"
-| BSA marks positionned at x = ±20mm on a 2" wafer ||  BSA marks positionned at x = ±40mm on a 4" wafer || BSA marks positionned at x = ±50mm on a 6" wafer
+| BSA marks positioned at x = ±20mm on a 2" wafer ||  BSA marks positioned at x = ±40mm on a 4" wafer || BSA marks positioned at x = ±50mm on a 6" wafer
 |}