Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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= Ethanol fume dryer = | = Ethanol fume dryer = | ||
If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water | If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water evaporate from the surface. | ||
[[image:Ethanol fume dry1.jpg|300x350px|left|thumb|Ethanol fume dry is placed to the right of the spin dryer 1 in C-1]] | [[image:Ethanol fume dry1.jpg|300x350px|left|thumb|Ethanol fume dry is placed to the right of the spin dryer 1 in C-1]] | ||