Specific Process Knowledge/Characterization/XPS: Difference between revisions
| Line 60: | Line 60: | ||
* Reflected Electron Energy Loss Spectroscopy | * Reflected Electron Energy Loss Spectroscopy | ||
* Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS) | * Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS) | ||
* Raman spectroscopy | |||
|- | |- | ||
!rowspan="5" style="background:silver; color:black" align="left"| Performance | !rowspan="5" style="background:silver; color:black" align="left"| Performance | ||