Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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Other studies on metals (NiFe/MnIr) show only limited effect of the substrate bias on the roughness. | Other studies on metals (NiFe/MnIr) show only limited effect of the substrate bias on the roughness. | ||
{| {{table}} | {| {{table}} border="1" cellspacing="0" cellpadding="8" | ||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | | align="center" style="background:#f0f0f0;"|'''Wafer nr''' | ||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | | align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | ||
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|} | |} | ||
{| {{table}} | {| {{table}} border="1" cellspacing="0" cellpadding="8" | ||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | | align="center" style="background:#f0f0f0;"|'''Wafer nr''' | ||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | | align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | ||
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|} | |} | ||
{| {{table}} | {| {{table}} border="1" cellspacing="0" cellpadding="8" | ||
| align="center" style="background:#f0f0f0;"|'''Wafer nr''' | | align="center" style="background:#f0f0f0;"|'''Wafer nr''' | ||
| align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | | align="center" style="background:#f0f0f0;"|'''RF bias (W)''' | ||