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Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions

Jehem (talk | contribs)
Jehem (talk | contribs)
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*Any material that is accepted in the machine
*Any material that is accepted in the machine
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*HF VPE mask material 1
*Aluminium
*HF VPE mask material 2
*Aluminium oxide
*HF VPE mask material 3
*Polysilicon
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