Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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This study was then done on 30 nm Ni<math>_{81}</math>Fe<math>_{19}</math> thin films deposited on 3 nm Ta on top of a SiO<math>_2</math> substrate, using R and AMR as an indication of strain. As seen in the tables, applying a substrate bias increases AMR and conductance (1/R). An equivalent effect is seen when heating the substrate during deposition. This heating can also be done after deposition without loosing the effect. | This study was then done on 30 nm Ni<math>_{81}</math>Fe<math>_{19}</math> thin films deposited on 3 nm Ta on top of a SiO<math>_2</math> substrate, using R and AMR as an indication of strain. As seen in the tables, applying a substrate bias increases AMR and conductance (1/R). An equivalent effect is seen when heating the substrate during deposition. This heating can also be done after deposition without loosing the effect. | ||
{| {{table}} border="1" cellspacing="0" cellpadding="8" | |||
| align="center" style="background:#f0f0f0;"|'''Name''' | |||
| align="center" style="background:#f0f0f0;"|'''Substrate bias (W)''' | |||
| align="center" style="background:#f0f0f0;"|'''AMR''' | |||
| align="center" style="background:#f0f0f0;"|'''1/R (S)''' | |||
| align="center" style="background:#f0f0f0;"|'''Crystal strain''' | |||
|- | |||
| 0029 NiFe3_stack_RF20||20||0.02724278||1.308044474|| | |||
|- | |||
| 0018_NiFe1_stack_RF||10||0.025850358||0.898311175|| | |||
|- | |||
| 0030 NiFe3_stack||0||0.020103598||0.71772052||0.8 | |||
|- | |||
|} | |||
{| {{table}} border="1" cellspacing="0" cellpadding="8" | |||
| align="center" style="background:#f0f0f0;"|'''Name''' | |||
| align="center" style="background:#f0f0f0;"|'''Temperature (C)''' | |||
| align="center" style="background:#f0f0f0;"|'''AMR''' | |||
| align="center" style="background:#f0f0f0;"|'''1/R (S)''' | |||
| align="center" style="background:#f0f0f0;"|'''Crystal strain''' | |||
|- | |||
| 0030 NiFe3_stack||25||0.020103598||0.71772052||0.8 | |||
|- | |||
| BDT-NiFe1-blank30||200||0.019319002||1.095770327|| | |||
|- | |||
| BTD-NiFe-Blank22||250||0.021768497||1.047668937|| | |||
|- | |||
| BTD-NiFe-Blank14||300||0.02983617||1.724137931|| | |||
|- | |||
| BTD-NiFe-Blank13||350||0.033944331||1.887504719|| | |||
|- | |||
| BTD-NiFe-Blank15||400||0.031176801||1.655903295||0.2 | |||
|- | |||
| BTD-NiFe-Blank16||450||0.030843457|||| | |||
|- | |||
| | |||
|} | |||