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Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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This study was then done on 30 nm Ni<math>_{81}</math>Fe<math>_{19}</math> thin films deposited on 3 nm Ta on top of a SiO<math>_2</math> substrate, using R and AMR as an indication of strain. As seen in the tables, applying a substrate bias increases AMR and conductance (1/R). An equivalent effect is seen when heating the substrate during deposition. This heating can also be done after deposition without loosing the effect.
This study was then done on 30 nm Ni<math>_{81}</math>Fe<math>_{19}</math> thin films deposited on 3 nm Ta on top of a SiO<math>_2</math> substrate, using R and AMR as an indication of strain. As seen in the tables, applying a substrate bias increases AMR and conductance (1/R). An equivalent effect is seen when heating the substrate during deposition. This heating can also be done after deposition without loosing the effect.
{| {{table}} border="1" cellspacing="0" cellpadding="8"
| align="center" style="background:#f0f0f0;"|'''Name'''
| align="center" style="background:#f0f0f0;"|'''Substrate bias (W)'''
| align="center" style="background:#f0f0f0;"|'''AMR'''
| align="center" style="background:#f0f0f0;"|'''1/R (S)'''
| align="center" style="background:#f0f0f0;"|'''Crystal strain'''
|-
| 0029 NiFe3_stack_RF20||20||0.02724278||1.308044474||
|-
| 0018_NiFe1_stack_RF||10||0.025850358||0.898311175||
|-
| 0030 NiFe3_stack||0||0.020103598||0.71772052||0.8
|-
|}
{| {{table}} border="1" cellspacing="0" cellpadding="8"
| align="center" style="background:#f0f0f0;"|'''Name'''
| align="center" style="background:#f0f0f0;"|'''Temperature (C)'''
| align="center" style="background:#f0f0f0;"|'''AMR'''
| align="center" style="background:#f0f0f0;"|'''1/R (S)'''
| align="center" style="background:#f0f0f0;"|'''Crystal strain'''
|-
| 0030 NiFe3_stack||25||0.020103598||0.71772052||0.8
|-
| BDT-NiFe1-blank30||200||0.019319002||1.095770327||
|-
| BTD-NiFe-Blank22||250||0.021768497||1.047668937||
|-
| BTD-NiFe-Blank14||300||0.02983617||1.724137931||
|-
| BTD-NiFe-Blank13||350||0.033944331||1.887504719||
|-
| BTD-NiFe-Blank15||400||0.031176801||1.655903295||0.2
|-
| BTD-NiFe-Blank16||450||0.030843457||||
|-
|
|}