Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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==Film quality optimization== | ==Film quality optimization== | ||
By Bjarke Thomas Dalslet @Nanotech.dtu.dk | ''By Bjarke Thomas Dalslet @Nanotech.dtu.dk'' | ||
The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | ||