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| '''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT. For further details see the acceptance test.'' | | '''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT. For further details see the acceptance test.'' |
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| ==Quality control (QC) for the Temescal==
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality control (QC) for the Temescal'''
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| |-
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| *[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal]<br>
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| {| {{table}}
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| | align="center" |
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| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px"
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| ! QC Recipe:
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| ! Ti / Au
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| ! other metal (if present, Al)
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| |-
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| |Deposition rate
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| |10 Å/s
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| |10 Å/s
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| |-
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| |Thickness
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| |10 nm / 90 nm
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| |100 nm
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| |-
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| |Pressure
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| |Below 1*10<sup>-6</sup> mbar
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| |Below 1*10<sup>-6</sup> mbar
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| |-
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| |}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
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| !QC limits
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| !Temescal
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| |-
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| |Deposition rate deviation
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| |± 20 %
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| |-
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| |Measured average thickness
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| |± 10 %
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| |-
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| |Thickness deviation across a 4" wafer
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| |± 5 %
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| |-
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| |}
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| |-
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| |}
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| Thicknesses are measured in 5 points with one of the Dektak instruments. <br>
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| Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au and Al films.
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| |}
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