Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
New page: ==Film quality optimization== The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), ... |
|||
| Line 1: | Line 1: | ||
==Film quality optimization== | ==Film quality optimization== | ||
By Bjarke Thomas Dalslet @Nanotech.dtu.dk | |||
The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing. | ||