Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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! style="background:silver; color:black" rowspan="2"| Allowed materials | ! style="background:silver; color:black" rowspan="2"| Allowed materials | ||
! style="background:lightgrey; color:black" | Materials | |||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||
* Silicon, Silicon oxide, silicon nitride | * Silicon, Silicon oxide, silicon nitride | ||