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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 6: Line 6:
The table below compares the hardware and the options.
The table below compares the hardware and the options.


[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=266 link til ICP Metal etch cross contamination sheet]
 


{| border="2" cellspacing="0" cellpadding="0" align="left"  
{| border="2" cellspacing="0" cellpadding="0" align="left"  
Line 239: Line 239:
* SIMS endpoint detection
* SIMS endpoint detection
|-valign="top"
|-valign="top"
! style="background:silver; color:black"| Allowed materials
 
| style="background:lightgrey; color:black" |  
! style="background:silver; color:black" rowspan="2"| Allowed materials
| style="background:lightgrey; color:black" | Materials
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" |  
* Silicon, Silicon oxide, silicon nitride
* Silicon, Silicon oxide, silicon nitride
Line 285: Line 286:
* Resists (at low temperature processing)
* Resists (at low temperature processing)
|style="background:lightgrey; color:black" |  
|style="background:lightgrey; color:black" |  
* Almost any material, see LabManager
* Almost any material
 
|-
| style="background:lightgrey; color:black" | Cross contamination sheet
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=105 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=115 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=265 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=398 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=105 Link peg 3]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=105 Link peg 4]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=266 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=155 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=268 Link]
| style="background:WhiteSmoke; color:black" | [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=105 Link ibsd]
|-
|-
|}
|}
[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=266 Link]
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