Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 8: | Line 8: | ||
{| border="2" cellspacing="0" cellpadding="0" align="left" | {| border="2" cellspacing="0" cellpadding="0" align="left" | ||
! colspan="2" style="background:silver; color:black" rowspan="2" | | ! colspan="2" style="background:silver; color:black" rowspan="2" | | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)| ASE]] | ! style="background:silver; color:black" rowspan="2" align="center" | [[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)| ASE]] | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/AOE_(Advanced_Oxide_Etch)| AOE]] | ! style="background:silver; color:black" rowspan="2" align="center"| [[Specific Process Knowledge/Etch/AOE_(Advanced_Oxide_Etch)| AOE]] | ||
! style="background:silver; color:black" colspan="4" align="center"| [[Specific Process Knowledge/Etch/DRIE-Pegasus| DRIE-Pegasi]] | ! style="background:silver; color:black" colspan="4" align="center"| [[Specific Process Knowledge/Etch/DRIE-Pegasus| DRIE-Pegasi]] | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/ICP_Metal_Etcher| ICP Metal etch ]] | ! style="background:silver; color:black" rowspan="2" align="center"| [[Specific Process Knowledge/Etch/ICP_Metal_Etcher| ICP Metal etch ]] | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/III-V RIE |III-V RIE ]] | ! style="background:silver; color:black" rowspan="2" align="center"| [[Specific Process Knowledge/Etch/III-V RIE |III-V RIE ]] | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/III-V ICP|III-V ICP]] | ! style="background:silver; color:black" rowspan="2" align="center"| [[Specific Process Knowledge/Etch/III-V ICP|III-V ICP]] | ||
! style="background:silver; color:black" rowspan="2" | [[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] | ! style="background:silver; color:black" rowspan="2" align="center"| [[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] | ||
|- valign="top" | |- valign="top" | ||
! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-1|Pegasus 1]] | ! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-1|Pegasus 1]] | ||