Specific Process Knowledge/Thin film deposition/Deposition of Magnesium: Difference between revisions
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==Summary Mg advice spring 2020== | ==Summary Mg advice spring 2020== | ||
Input collected by Rebecca (reet) | |||
*None of the groups we wrote to have mentioned that they have experience with using the chamber for something else after using it for Mg. | *None of the groups we wrote to have mentioned that they have experience with using the chamber for something else after using it for Mg. | ||
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===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg) === | ===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg) === | ||
Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg. | *Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg. | ||
Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that. | *Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that. | ||
They had no issues w Mg and their cryo pump as far as she knows. | *They had no issues w Mg and their cryo pump as far as she knows. | ||
===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung (sputter deposition and also cathode arc and ion beam sputtering of Mg in the past)=== | ===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung (sputter deposition and also cathode arc and ion beam sputtering of Mg in the past)=== | ||
Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films. | *Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films. | ||
On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness. | *On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness. | ||
It is possible to contact them and visit their lab. They have a lot of expertise on Mg. | *It is possible to contact them and visit their lab. They have a lot of expertise on Mg. | ||
===Diederik Depla, Ghent University (sputtering including HiPIMS of Mg)=== | ===Diederik Depla, Ghent University (sputtering including HiPIMS of Mg)=== | ||
Mainly used their setup for Mg, haven’t checked cross-contamination. | *Mainly used their setup for Mg, haven’t checked cross-contamination. | ||
Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination | *Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination | ||
They used a turbo/rotary vane pump, no specific reason. | *They used a turbo/rotary vane pump, no specific reason. | ||
Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue. | *Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue. | ||