LabAdviser/Courses/TPT Thin Film: Difference between revisions

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<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.  
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.  


No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try  to schedule a lecture.</i>
No Thin Film TPT courses have been scheduled before the summer vacation. The next lecture will probably be held in week 34. If you are interested in attending the course before that, please send an email to thinfilm@nanolab.dtu.dk, and then it might be possible to arrange a lecture earlier, if you are a small group of people. It is also possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
 
If you are a small group of people, then we will try  to schedule a lecture.</i>
<!-- The next lecture will be held online (using Zoom) on the 28th of May from 10.00 to 12.30
<!-- The next lecture will be held online (using Zoom) on the 28th of May from 10.00 to 12.30
The date will come after the summer vaction-->  
The date will come after the summer vaction-->  
Line 47: Line 49:
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf


No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try  to schedule a lecture.</i>
No Thin Film TPT courses have been scheduled before the summer vacation. The next lecture will probably be held in week 34. If you are interested in attending the course before that, please send an email to thinfilm@nanolab.dtu.dk, and then it might be possible to arrange a lecture earlier, if you are a small group of people. It is also possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
<!--The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30  
<!--The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30  
The date will come after the summer vaction</i>-->
The date will come after the summer vaction</i>-->

Revision as of 10:00, 2 July 2020

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.

No Thin Film TPT courses have been scheduled before the summer vacation. The next lecture will probably be held in week 34. If you are interested in attending the course before that, please send an email to thinfilm@nanolab.dtu.dk, and then it might be possible to arrange a lecture earlier, if you are a small group of people. It is also possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.

If you are a small group of people, then we will try to schedule a lecture.

2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
  • PVD (physical vapour deposition)
    • E-beam evaporation
    • Thermal evaporation
    • Sputtering
  • CVD (chemical vapour depostion)
    • LPCVD (low pressure chemical vapour deposition)
    • PECVD (plasma enhanced chemical vapour deposition)
  • ALD (atomic layer deposition)

Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf

No Thin Film TPT courses have been scheduled before the summer vacation. The next lecture will probably be held in week 34. If you are interested in attending the course before that, please send an email to thinfilm@nanolab.dtu.dk, and then it might be possible to arrange a lecture earlier, if you are a small group of people. It is also possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.

Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand importance of correct process pressure (for vacuum processes)
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


THIS PAGE IS UNDER CONSTRUCTION

Literature

Thermal Oxidation
Stress in Thin Films
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