Specific Process Knowledge/Characterization/Profiler: Difference between revisions
m →Dektak 8 stylus profiler: corrected links etc |
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[[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom F-2.]] | [[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom F-2.]] | ||
Dektak 8 stylus profiler is a product of Veeco Instruments. It is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions. | The Dektak 8 stylus profiler is a product of Veeco Instruments. It is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions. | ||
It can measure specific structures found with the help of a high magnification video camera or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow. | It can measure specific structures found with the help of a high magnification video camera or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow. | ||
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
~ 300 Å for the 65 kÅ range, ~ 0.16 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range ([[#Height measurement accuracy|see below]]) | ~ 300 Å for the 65 kÅ range, ~ 0.16 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range for well-defined steps that are easy to measure ([[#Height measurement accuracy|see below]]) | ||
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|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | ||
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=== Height measurement accuracy === | === Height measurement accuracy === | ||
[[#Height accuracy|See above for the DektakXTA]] as the considerations for the Dektak 8 are the same though the resolution and measurement repeatability is a tiny bit better for the Dektak 8 than for the DektakXTA. | [[#Height measurement accuracy for the DektakXT|See above for the DektakXTA]] as the considerations for the Dektak 8 are the same, though the resolution and measurement repeatability is a tiny bit better for the Dektak 8 than for the DektakXTA. | ||
==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||