Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions

Revision as of 16:16, 9 June 2020 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,377 edits →Process information ← Older edit		Revision as of 12:23, 18 June 2020 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,377 edits →Process information Newer edit →
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	'''Standard recipes on ALD 2 (PEALD):'''		'''Standard recipes on ALD 2 (PEALD):'''

	*[[/Standard recipes on the ALD2 tool\|Standard recipes on the ALD 2 (PEALD)]]		*[[/Standard recipes on the ALD2 tool\|Standard recipes on the <b>ALD 2 (PEALD)</b>]]