LabAdviser/Courses/TPT Thin Film: Difference between revisions

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<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.  
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.  


The next lecture will be held online (using Zoom) on the 28th of May from 10.00 to 12.30</i>
No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try  to schedule a lecture.</i>
<!-- The date will come after the summer vaction-->  
<!-- The next lecture will be held online (using Zoom) on the 28th of May from 10.00 to 12.30
The date will come after the summer vaction-->  


'''2<sup>nd</sup> lecture (3 hours):'''
'''2<sup>nd</sup> lecture (3 hours):'''
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<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf


The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30 </i>
No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try  to schedule a lecture.</i>
<!--The date will come after the summer vaction</i>-->
<!--The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30  
The date will come after the summer vaction</i>-->


<b>Practical part</b>
<b>Practical part</b>

Revision as of 08:22, 12 June 2020

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.

No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try to schedule a lecture.

2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
  • PVD (physical vapour deposition)
    • E-beam evaporation
    • Thermal evaporation
    • Sputtering
  • CVD (chemical vapour depostion)
    • LPCVD (low pressure chemical vapour deposition)
    • PECVD (plasma enhanced chemical vapour deposition)
  • ALD (atomic layer deposition)

Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf

No Thin Film TPT courses have been scheduled before the summer vacation. If you are interested in attending the course now, please send an email to thinfilm@nanolab.dtu.dk. If you are a small group of people, then we will try to schedule a lecture.

Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand importance of correct process pressure (for vacuum processes)
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


THIS PAGE IS UNDER CONSTRUCTION

Literature

Thermal Oxidation
Stress in Thin Films
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