Specific Process Knowledge/Characterization/Profiler: Difference between revisions
m →Height accuracy: edit |
→Equipment performance and process related parameters Dektak 8 stylus profiler: added height meas uncertainty values |
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|style="background:LightGrey; color:black"|Resolution z | |style="background:LightGrey; color:black"|Resolution z | ||
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1 Å, 10 Å, | 1 Å, 10 Å, 40 Å or 160 Å (for ranges 65 kÅ, 655 kÅ, 2620 kÅ and 1 mm respectively) | ||
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |||
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~ 300 Å for the 65 kÅ range, ~ 0.16 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range ([[#Height measurement accuracy|see below]]) | |||
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|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | ||