Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 79: | Line 79: | ||
|Type IV and resist/polymer on polymer substrate | |Type IV and resist/polymer on polymer substrate | ||
i.e. no coated wafers or crystalbonded chips! | i.e. no resist coated wafers or crystalbonded chips! | ||
|Wafers with metal is not allowed | |Wafers with metal is not allowed | ||
|Resist is not allowed | |Resist is not allowed | ||