Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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!Restrictions | !Restrictions | ||
|Type IV and resist/polymer on polymer substrate | |Type IV and resist/polymer on polymer substrate | ||
i.e. no coated wafers or crystalbonded chips! | |||
|Wafers with metal is not allowed | |Wafers with metal is not allowed | ||
|Resist is not allowed | |Resist is not allowed | ||