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Specific Process Knowledge/Characterization/SEM Supra 2: Difference between revisions

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→Equipment performances: added qc procedure
Line 97: Line 97:
*Any standard cleanroom material
*Any standard cleanroom material
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==Quality control of length measurement ==
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for SEM Supra 2'''
|-
|
*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=327 QC procedure for SEM Supra 2]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=327 Newest QC data for SEM Supra 2]<br>
'''QC limits:'''
{| {{table}}
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
! Detector
! Settings
! Magnification
! Measured dimensions
! Calibration limit
! Action limit
|-
|SE2
| EHT 10 kV, WD 10 mm
| 2.500 k
| 70x70 μm
| ± 2 %
| ± 3 %
|-
|SE2
| EHT 10 kV, WD 10 mm
| 17.000 k
| 10x10 μm
| ± 2 %
| ± 3 %
|-
|-
|SE2
| EHT 10 kV, WD 10 mm
| 75.000 k
| 2x2 μm
| ± 2 %
| ± 3 %
|-
|SE2
| EHT 5 kV, WD 5 mm
| 17.000 k
| 10x10 μm
| ± 2 %
| ± 3 %
|-
| VPSE
| EHT 10 kV, WD 10 mm, 17 Pa
| 17.000 k
| 10x10 μm
| ± 2 %
| ± 3 %
|-
| InLens
| EHT 5 kV, WD 5 mm
| 200.000 k
| 1x1 μm
| ± 2 %
| ± 3 %
|-
| InLens
| EHT 10 kV, WD 3 mm
| 1.000.000 k
| (imaging only)
| NA
| NA
|-
|}
|-
|}
|}
|}
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