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Specific Process Knowledge/Characterization/SEM Supra 1: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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→Equipment performance: added QC section
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,763 edits
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===Quality control of length measurement accuracy [[Image:section under construction.jpg|70px]]===
===Quality control of length measurement [[Image:section under construction.jpg|70px]]===
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for DektakXTA'''
|bgcolor="#98FB98" |'''Quality Control (QC) for SEM Supra 1'''
|-
|-
|
|
*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for SEM Supra 1]<br>
*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for SEM Supra 1]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>
'''QC limits:'''
{| {{table}}
{| {{table}}
| align="center" valign="top"|
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:300px"
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"


! Detector
! Detector
! Measurement settings
! Settings
! Magnification
! Magnification
! Measured dimensions  
! Measured dimensions  
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| EHT 10 kV, WD 10 mm
| EHT 10 kV, WD 10 mm
| 2.500 k
| 2.500 k
| 70x70 microns
| 70x70 μm
| ± 2 %
| ± 2 %
| ± 3 %
| ± 3 %
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| EHT 10 kV, WD 10 mm
| EHT 10 kV, WD 10 mm
| 17.000 k
| 17.000 k
| 10x10 microns
| 10x10 μm
| ± 2 %
| ± 2 %
| ± 3 %
| ± 3 %
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| EHT 5 kV, WD 5 mm
| EHT 5 kV, WD 5 mm
| 17.000 k
| 17.000 k
| 10x10 microns
| 10x10 μm
| ± 2 %
| ± 2 %
| ± 3 %
| ± 3 %
|-
| VPSE
| EHT 10 kV, WD 10 mm, 17 Pa
| 17.000 k
| 10x10 μm
| ± 2 %
| ± 3 %
|-
| InLens
| EHT 5 kV, WD 5 mm
| 200.000 k
| 1x1 μm
| ± 2 %
| ± 3 %
|-
| InLens
| EHT 10 kV, WD 3 mm
| 1.000.000 k
| (imaging only)
| NA
| NA
|-
|-


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