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*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties]
*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
======Thermal Oxidation======
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]

Revision as of 16:29, 13 May 2020

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.

The next lecture will be held online (using Zoom) on the 28th of June from 10.00 to 12.30

2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
  • PVD (physical vapour deposition)
    • E-beam evaporation
    • Thermal evaporation
    • Sputtering
  • CVD (chemical vapour depostion)
    • LPCVD (low pressure chemical vapour deposition)
    • PECVD (plasma enhanced chemical vapour deposition)
  • ALD (atomic layer deposition)

Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30

Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand importance of correct process pressure (for vacuum processes)
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2

Literature


Thermal Oxidation
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