LabAdviser/Courses/TPT Thin Film: Difference between revisions
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*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films] | ||
*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties] | *[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties] | ||
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films] | *[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films] | ||