|
|
| Line 105: |
Line 105: |
|
| |
|
|
| |
|
| '''<big>Literature</big>'''
| | ====Literature==== |
| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography] | | |
| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
| | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Franssila, 2010, Chapter 5: Thin-Film Materials and Processes] |
| *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
| |
| *[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
| |
