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===Material for preparations and further information===
===Slides from the lectures===
===Slides from the lectures===


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<big>Slides from lecture 2</big>
<big>Slides from lecture 2</big>
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_March_2020.pptx]]
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_March_2020.pptx]]
'''<big>Literature</big>'''
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]